MEMS research in RF, optoelectronics (MOEMS), materials/reliability, high-temperature devices, packaging, and self-assembly.

The Caltech Micromachining Lab is headed by Prof. Yu-Chong Tai. Research in the lab includes MEMS technology, microsensors, microactuators, microstructure, MEMS systems, and MEMS science. The lab is a complete micromachining facility including a clean-room processing lab, a computer lab, and a measurement/testing lab. The facility is currently sponsoring more than 20 researchers (14 Ph.D.

Micro Instrumentation Research Laboratory, University of Utah. MEMS Research Lab, Instructional Lab, Bootcamp, Research Group, And Links.

The goal of the Institute for Micromachining and Microfabrication Research is to enhance micromachining research and development and to encourage the application of research results in the design and fabrication of miniature sensors and actuators ...